CIGS Thin Film Analysis Tools for The Solar Industry

...the Next Generation Energy Provider.

"CIS, CIGS, CIGSSe and CdTe Solar PV Thin Film Composition and Thickness Measurement Systems"

2. Anti-Reflective Coating Measurement of Solar Cells;  Thickness & Refractive Index of Silicon Nitride

For wafer based solar cells the anti-reflective coating, surface passivation and diffusion barrier play an important role to achieve high solar cell efficiency and long-term stability. Because of its excellent characteristics Silicon Nitride coating (a-SiNx:H) is widely used for this purpose.

Process parameters such as the gas pressure and temperature of the cell during deposition have a strong influence on the layer thickness and optical constants n&k of Silicon Nitride. Therefore, it is essential to gain detailed knowledge of the layer thickness and the optical constants n&k during the process.
Conventional measurement technology can only measure Silicon Nitride layer properties offline and on polished wafers.

Measurement of Silicon Nitride

AudioDev offers unique equipment to measure the layer thickness as well as refractive index of the Silicon Nitride layer. The system is designed and optimized for inline use and can be retrofitted in existing production lines. .

Measurement Example

Measurement of thickness and refractive index of
Silicon Nitride

The AudioDev Helios Inline-tn - Inline System

3. OLED & LED Application

- Thin Film Measurement

㈜ Solar Met는 독일 AudioDev사의 OLED 및 LED두께 측정용 Thin-Film Measurement 장비를 독점 공급해 드리고 있습니다.

Application; Organic layer 및 모든 종류의 박막 두께 측정

Thin film layer : SiO2, CaF2, MgF2, Photoresist, Polysilicon,

Amorphous, SiNx, TiO2, Polyimide, Polymer Film, Silicon

Substrate물질 : Sapphire, Silicon, GaAs, ZnS, ZnSe, Germanium, Acrylic, Glasses, Polymer, Quartz, Aluminium, Polycarbonate

4. Semiconductor - www.protop.asia

- Thin Film Measurement